Amorphous CVD Al[sub 2]O[sub 3] Films by Ta-Doping and Their Physicochemical Properties
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ID: 36638
1976
| Reference Key |
tsang1976amorphousjournal
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|---|---|
| Authors | Tsang, Paul J.; |
| Journal | journal of the electrochemical society |
| Year | 1976 |
| DOI | 10.1149/1.2132765 |
| URL | |
| Keywords | Keywords not found |
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