Diamond refractive micro-lenses for full-field X-ray imaging and microscopy produced with ion beam lithography.
Clicks: 172
ID: 99804
2020
We demonstrate that ion-beam lithography can be applied to the fabrication of rotationally parabolic refractive diamond X-ray micro-lenses that are of interest to the field of high-resolution X-ray focusing and microscopy. Three single half-lenses with curvature radii of 4.8 µm were produced and stacked to form a compound refractive lens, which provided diffraction-limited focusing of X-ray radiation at the P14 beamline of PETRA-III (DESY). As shown with SEM, the lenses are free of expressed low- and high-frequency shape modulations with a figure error of < 200 nm and surface roughness of 30 nm. Precise micro-manipulation and stacking of individual lenses are demonstrated, which opens up new opportunities for compact X-ray microscopy with nanometer resolution.
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medvedskaya2020diamondoptics
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| Authors | Medvedskaya, Polina;Lyatun, Ivan;Shevyrtalov, Sergey;Polikarpov, Maxim;Snigireva, Irina;Yunkin, Vyacheslav;Snigirev, Anatoly; |
| Journal | Optics express |
| Year | 2020 |
| DOI | 10.1364/OE.384647 |
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